Dynamic properties of individual carbon nanotube emitters for maskless lithography

B. Ribaya, D. Niemann, J. Makarewicz, N. Gunther, C. Nguyen, M. Rahman
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引用次数: 1

Abstract

In this paper, we present an empirical study of dynamic behavior of an electron source system which incorporates an individual CNT. We propose a representative circuit model that is simple yet particularly valuable for emission current control for each CNT emitter in an array to facilitate high throughput maskless lithography.
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无掩模光刻中单个碳纳米管发射体的动态特性
在本文中,我们提出了一个实证研究的动态行为的电子源系统,其中包括一个单独的碳纳米管。我们提出了一个具有代表性的电路模型,该模型简单,但对于阵列中每个碳纳米管发射极的发射电流控制特别有价值,以促进高通量无掩模光刻。
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