Properties of ZnCoO thin films obtained by a pulsed laser deposition method

I. Virt, I. Stefaniuk, P. Potera, B. Cieniek
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Abstract

Structural, optical, and magnetic properties of the zinc-cobalt oxide (ZnCoO) thin layers obtained by a pulsed laser deposition process, grown on silicon, sapphire, glass, and quartz substrates have been investigated. The material was characterized by electron magnetic resonance, X-ray diffraction, optical transmission and absorption spectra, and conductivity measurements. The influence of the target compositions and annealing after deposition on the transmission of films and the gap energy was also evaluated.
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脉冲激光沉积法制备ZnCoO薄膜的性能
研究了脉冲激光沉积工艺在硅、蓝宝石、玻璃和石英衬底上生长的锌钴氧化物(ZnCoO)薄层的结构、光学和磁性能。通过电子磁共振、x射线衍射、光透射和吸收光谱以及电导率测量对材料进行了表征。研究了靶材成分和沉积后退火对薄膜透射率和间隙能的影响。
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