Intracavity control of solid-state lasers using MEMS micromirrors

A. Paterson, R. Bauer, C. Clark, D. Uttamchandani, W. Lubeigt
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Abstract

Active control of key laser output beam parameters, such as optical power and transverse intensity profile, of a continuous-wave (CW) Nd:YAG laser is reported. This was achieved by accurately controlling the surface profile of an intracavity MEMS micromirror through active control of its substrate temperature. An output power variation (>20%) and a significant modification of the transverse mode profile could be observed for a temperature variation of ~35 °C.
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基于MEMS微镜的固体激光器腔内控制
本文报道了连续波Nd:YAG激光器输出光束的光功率和横向强度分布等关键参数的主动控制。这是通过主动控制衬底温度来精确控制腔内MEMS微镜的表面轮廓来实现的。当温度变化为~35°C时,可以观察到输出功率变化(>20%)和横向模式轮廓的显著改变。
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