Vacuum arc ion source with compound cathode and beam separation by bending magnet

K. Savkin, E. Oks, V. Gushenets, V. Frolova, A. Nikolaev, G. Yushkov
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引用次数: 1

Abstract

The paper reports on a mass-charge spectrometry study of ion beams extracted from the plasma of a vacuum arc discharge with a compound lanthanum hexaboride cathode. The elemental composition of the ion beams was analyzed using a magnetic separator. The vacuum arc operated in repetitive pulsed mode with a current amplitude of 140 A, full width at the base of ~350 μs, and frequency of 2 Hz. The ion-extracting dc voltage was 20 kV. The absolute currents of B+, B2+, and B3+ ions were several hundred microamperes. The extraction of mono-element B ion beams with a low energy spread from the plasma of a vacuum arc is attractive for use in ion beam boriding technologies.
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复合阴极弯曲磁体束分离真空电弧离子源
本文报道了用复合六硼化镧阴极从真空电弧放电等离子体中提取的离子束的质荷谱分析。用磁选机分析了离子束的元素组成。真空电弧工作在重复脉冲模式下,电流幅值为140 a,基底全宽为~350 μs,频率为2 Hz。离子提取直流电压为20 kV。B+、B2+和B3+离子的绝对电流为几百微安。从真空电弧等离子体中提取低能量扩散的单元素B离子束是离子束渗硼技术的重要应用。
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