A generalized stochastic Petri net model for performance analysis and control of capacitated reentrant lines

J. Choi, S. Reveliotis
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引用次数: 58

Abstract

The basic definition of the reentrant line, which constitutes the typical abstraction for the formal modeling and analysis of the fabrication (fab) scheduling problem, considers only the job contest for the finite processing capacity of the system workstations, ignoring completely the effects and complications arising from additional operational issues like the finite buffering capacity of the system workstations/production units. Yet, as the semiconductor industry moves to more extensively automated operational modes, the explicit characterization and control of these additional operational features is of paramount importance for the robust and stable operation of the entire system. Moreover, the operational policies developed to control these logical aspects of the system behavior introduce additional constraints to the fab scheduling problem, that complicate it even further and, more importantly, invalidate prior characterizations of its optimal solutions. Motivated by these remarks, the work presented in the paper develops an analytical framework for the modeling, analysis, and control of capacitated, flexibly automated reentrant lines, based on the class of generalized stochastic Petri nets. The proposed framework allows the seamless integration of the logical/structural and the timed-based aspects of the system behavior, provides an analytical formulation for the underlying scheduling problem, and leads to an interesting qualitative characterization of the structure of the optimal scheduling policy. Hence, it provides the analytical basis for addressing the reentrant line scheduling problem in its contemporary, more complex operational context, and it constitutes the starting point for the development of new scheduling tools and policies for it.
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基于广义随机Petri网的可重入线性能分析与控制模型
可重入线的基本定义构成了制造(fab)调度问题的形式化建模和分析的典型抽象,它只考虑系统工作站有限处理能力的作业竞争,完全忽略了系统工作站/生产单元有限缓冲能力等附加操作问题所产生的影响和复杂性。然而,随着半导体行业转向更广泛的自动化操作模式,这些附加操作特征的明确表征和控制对于整个系统的稳健和稳定运行至关重要。此外,为控制系统行为的这些逻辑方面而开发的操作策略为晶圆厂调度问题引入了额外的约束,使其进一步复杂化,更重要的是,使其最佳解决方案的先前特征失效。在这些评论的激励下,本文提出的工作基于广义随机Petri网类,开发了一个分析框架,用于建模、分析和控制有能力的、灵活的自动重入线。所提出的框架允许系统行为的逻辑/结构和基于时间的方面的无缝集成,为潜在的调度问题提供了一个分析公式,并导致最优调度策略结构的有趣定性表征。因此,它为在当代更复杂的操作环境中解决可重入线调度问题提供了分析基础,并构成了开发新的调度工具和策略的起点。
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