{"title":"λ/8 Precision parabolic resonant varifocal mirror","authors":"K. Nakazawa, Takashi Sasaki, K. Hane","doi":"10.1109/OMN.2014.6924613","DOIUrl":null,"url":null,"abstract":"An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2014.6924613","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.
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