Fabrication of A Nickel MEMS Accelerometer Based On SU-8 LIGA Process

Abstract

This paper presents a new approach for fabrication of Nickel based MEMS z- axis accelerometer that makes use of SU-8 LIGA based fabrication process that is capable of operating at an elevated temperature. Here the usage of nickel is backed by facts like polymer-based material not being appropriate for high temperature and high stress applications and silicon-based micromachining process requiring expensive equipment and materials. This fabrication method offers the usage of a simple, cost effective and an indigenous process.