Testing of Aspheric Surfaces with Computer Generated Holograms

Yaw-Tzong Tang, M. Chang
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Abstract

Usually, aspheric testing by CGH uses Twyman-Green interferometer setup. Then the accuracy is limited by the reference mirror and optical elements been used. We use the modified Fizeau interferometer setup. A second beam splitter is placed in the focal plane of a diverger lens. The reflection beam by this B.S. is regarded as reference wave. Then the setup will have three merits: (1) The two beams go through almost the same position at each optical element, so the quality of the optical elements such as the diverger lens and the first beam splitter can be neglected. (2) The second beam splitter (now the reference surface) is easily to be made high quality because of the region been used is very small. So we may consider the reference wave as perfect. (3) It is easily to control the diffraction order to obtain the interference pattern. Besides, we describe the real interference pattern by computer based on analytic equations and calculate the exact position of the interference fringes as in the conventional hologram. Therefore, the plot of the CGH is pure interferometric type.
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用计算机生成全息图检测非球面
CGH非球面检测通常采用Twyman-Green干涉仪装置。然后,精度受到参考镜和所用光学元件的限制。我们使用改进的菲索干涉仪装置。第二分束器放置在发散透镜的焦平面上。将反射波束作为参考波。这样的设置将有三个优点:(1)两束光在每个光学元件上经过几乎相同的位置,因此可以忽略散光透镜和第一分束器等光学元件的质量。(2)第二分束器(现在的参考面)由于使用的区域很小,很容易制作出高质量的分束器。所以我们可以认为参考波是完美的。(3)易于控制衍射顺序以获得干涉图样。此外,我们还根据解析方程用计算机描述了实际干涉图样,并计算出干涉条纹的精确位置。因此,CGH的图是纯干涉型。
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