K. S. Thakare, S. J. Patil, S. Deshmukh, R. Y. Borse, R. R. Ahire
{"title":"Preparation, Characterization and Gas Sensing Performance of Pure SnO2 Thin Films Deposited using Physical Vapour Deposition Technique","authors":"K. S. Thakare, S. J. Patil, S. Deshmukh, R. Y. Borse, R. R. Ahire","doi":"10.21013/JTE.V4.N2.P2","DOIUrl":null,"url":null,"abstract":"Nanocrystalline SnO 2 thin films were successfully prepared using Physical Vapour Deposition technique and were annealed at 400 o C. Structural, morphological, elemental, compositional, optical, and electrical and gas sensing properties were studied using XRD, FESEM, EDXS, UV-Vis Spectrophotometer, DC resistance measurement method respectively. Acetone, Cl 2 , CO 2 , Ethanol, H 2 S and NH 3 sensing performance of Nanocrystalline physically vaporized SnO 2 thin films were investigated and reported in this paper. The results were systematically tabulated, interpreted and discussed.","PeriodicalId":269688,"journal":{"name":"IRA-International Journal of Technology & Engineering","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IRA-International Journal of Technology & Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21013/JTE.V4.N2.P2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Nanocrystalline SnO 2 thin films were successfully prepared using Physical Vapour Deposition technique and were annealed at 400 o C. Structural, morphological, elemental, compositional, optical, and electrical and gas sensing properties were studied using XRD, FESEM, EDXS, UV-Vis Spectrophotometer, DC resistance measurement method respectively. Acetone, Cl 2 , CO 2 , Ethanol, H 2 S and NH 3 sensing performance of Nanocrystalline physically vaporized SnO 2 thin films were investigated and reported in this paper. The results were systematically tabulated, interpreted and discussed.
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