Absolute testing of spherical optics

C. Evans, Robert E. Parks
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引用次数: 1

Abstract

Interferometric testing of tight tolerance optics commonly requires correction for the errors introduced into the system by the reference surface (commonly referred to as a 'transmission sphere' in commercially available Fizeau phase measuring interferometers (PMIs)). The process of subtracting the reference surface errors from the measured wavefront is commonly, if somewhat misleadingly, referred to as 'absolute testing'. Absolute testing of flats was discussed at the 1992 Optical fabrication and Testing workshop. Here we consider spherical optics.
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球面光学的绝对测试
严格公差光学的干涉测试通常需要校正由参考面引入系统的误差(在市售的菲索相位测量干涉仪(pmi)中通常称为“透射球”)。从被测波前减去参考面误差的过程通常被称为“绝对测试”,如果有些误导的话。1992年光学制造与测试研讨会讨论了平片的绝对测试。这里我们考虑球面光学。
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Defocus Measurement Using A Liquid Crystal Point Diffraction Interferometer Aberration Measurement Using Axial Intensity Polished Substrate Surface and Cleaning Study for Coated Optic Quality* Zerodur Polishing Process for High Surface Quality and High Efficiency* Surface Evaluation Techniques for the Optics of the Future
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