{"title":"The annealing process of R.F. magnetron sputtered ZnO:Al films","authors":"Yu Zhi-nong, Xu Jin, Xue Wei, L. Jinwei","doi":"10.1109/AOE.2007.4410872","DOIUrl":null,"url":null,"abstract":"The ZnO:AI films were annealed at different atmosphere. The films annealed in vacuum showed perfect properties, compared with in air and Ar atmosphere, and the low resistivity of the order of 10-3 Omegaldrcm was obtained in the condition of vacuum annealing at 220degC.","PeriodicalId":370885,"journal":{"name":"2007 Asia Optical Fiber Communication and Optoelectronics Conference","volume":"25 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 Asia Optical Fiber Communication and Optoelectronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/AOE.2007.4410872","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The ZnO:AI films were annealed at different atmosphere. The films annealed in vacuum showed perfect properties, compared with in air and Ar atmosphere, and the low resistivity of the order of 10-3 Omegaldrcm was obtained in the condition of vacuum annealing at 220degC.
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