Response of MOSFETs from DMILL technology to high total dose levels

J.M. Armani, C. Brisset, F. Joffre, M. Dentan
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引用次数: 4

Abstract

We have investigated the response of MOS transistors fabricated using the DMILL process and irradiated to a total dose of 1MGy(Si)/sup 1/ with a /sup 60/Co source. Results show that parameter shifts remain limited, thus authorizing use of this technology in environments involving very high levels of radiation.
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DMILL技术的mosfet对高总剂量水平的响应
我们研究了用DMILL工艺制作的MOS晶体管的响应,用/sup 60/Co源照射总剂量为1MGy(Si)/sup 1/。结果表明,参数变化仍然有限,因此授权在辐射水平非常高的环境中使用该技术。
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