The online system of measuring film thickness

P. He, Hongli Chang, Han Gao, ZiYi Wang
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Abstract

Measuring Film Thickness is not only an important part for controlling the precision of the products, but also can reduce the cost. This system is based on the core processor (TMS32-0F2812), and it has four parts: optical signal driving circuit, analog signal acquisition and processing circuit, data sampling and processing circuit and human machine interaction. This system uses CCS software development platform as its software development environment, and it meets all functional requirements through programming and debugging.
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薄膜厚度在线测量系统
薄膜厚度的测量不仅是控制产品精度的重要环节,而且可以降低成本。本系统以TMS32-0F2812为核心处理器,由光信号驱动电路、模拟信号采集与处理电路、数据采样与处理电路和人机交互四个部分组成。本系统采用CCS软件开发平台作为软件开发环境,经过编程和调试,满足了系统的各项功能需求。
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