Integration of IDE with ZnO nanoparticles for detection of synthetic formaldehyde liquid

Abstract

This paper presents the electrical properties of ZnO deposited on Al interdigitated electrodes (IDE) for detection of synthetic formaldehyde liquid at different concentration. Firstly, the 50-nm gap size of Al IDE pattern was designed and fabricated. The ZnO solution was prepared and deposited on entire surface consisting of Al IDE and SiO2 (in between the IDE fingers) structure through sol-gel method. The surface was characterized by using scanning electron microscopy (SEM) and the electrical characteristics was measured by using source meter (keithley 6487). Result shows that the IDE with ZnO device sensor is capable to detect various formaldehyde liquid concentration (5 ppm, 3 ppm and 1.5 ppm).