F. Boody, J. Kempf, R. Hopfl, H. Hora, L. Laska, L. Juha, K. Rohlena, J. Krása, M. Pfeifer, F. Woryna, J. Wołowski, V. Pefina
{"title":"The Laser Ion Implantation Facility LIIF: design and first results","authors":"F. Boody, J. Kempf, R. Hopfl, H. Hora, L. Laska, L. Juha, K. Rohlena, J. Krása, M. Pfeifer, F. Woryna, J. Wołowski, V. Pefina","doi":"10.1109/CLEOE.2000.910376","DOIUrl":null,"url":null,"abstract":"Summary form only given. The Laser Ion Implantation Facility has been designed to study the commercial feasibility of laser ion implantation using an industrial excimer laser. Design details and first results of characterizing the ion source and implanting ions are presented.","PeriodicalId":250878,"journal":{"name":"Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)","volume":"99 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE.2000.910376","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Summary form only given. The Laser Ion Implantation Facility has been designed to study the commercial feasibility of laser ion implantation using an industrial excimer laser. Design details and first results of characterizing the ion source and implanting ions are presented.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
