Jayanta Parui, Mani R, Jain Jose, Shama Parwin, E. Varadarajan, V. Natarajan
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引用次数: 0
Abstract
130,000 g/mol molecular weight of polyvinylpyrrolidone (PVP) was purposed to prepare PZT sol desiring the thick film (≥1.0 µm) deposition on Pt(111)/TiO2/SiO2/Si. Centrifugal force and the spilling of sol during spin coating were found to control the cracks and surface coverage of the films. A rotation-dependent typical pattern formation at the central part of the substrate was observed and better coverage was observed on gel drying 60 °C than 125 °C. Though the remnant polarization (2Pr) of 21.4 µC/cm2 was recorded at 100 Hz for 2.1 µm, it is 41.8 µC/cm2 for 1.06 µm thick films.
期刊介绍：
Integrated Ferroelectrics provides an international, interdisciplinary forum for electronic engineers and physicists as well as process and systems engineers, ceramicists, and chemists who are involved in research, design, development, manufacturing and utilization of integrated ferroelectric devices. Such devices unite ferroelectric films and semiconductor integrated circuit chips. The result is a new family of electronic devices, which combine the unique nonvolatile memory, pyroelectric, piezoelectric, photorefractive, radiation-hard, acoustic and/or dielectric properties of ferroelectric materials with the dynamic memory, logic and/or amplification properties and miniaturization and low-cost advantages of semiconductor i.c. technology.
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