{"title":"Fabrication and Characterization of suspended La<sub>0.7</sub>Sr<sub>0.3</sub>MnO<sub>3</sub>Nanofibers for high-sensitive and fast-responsive Infrared Bolometer","authors":"nirupam paul, Sudharshan vandala, satish bonam, Amit Agrawal, Siva Rama Krishna Vanjari, Shiv Govind Singh","doi":"10.1088/1361-6439/ad0a3c","DOIUrl":null,"url":null,"abstract":"Abstract La 1-x Sr x MnO 3 manganite oxides have shown great potential for infrared sensing. In this study, La 0.7 Sr 0.3 MnO 3 (LSMO) nanofibers, synthesized by a simple electrospinning process, are suspended between gold interdigitated electrodes(IDE). These electrodes, which acts as a supporting platform for the dangling nanofiber, are Microelectromechanical systems (MEMS) based that can be fabricated quickly and economically with fewer fabrication steps. Due to the large surface-area-to-volume ratio, these fibers have outstanding thermo-electrical properties, which puts them in the leagues of materials suitable for infrared sensing. Performance-wise these hanging nanofibers belong to a class of promising thermal sensors due to negligible thermal loss. The optoelectrical characterization shows its TCR is -1.48 %K -1 , and its electrical resistance follows an inverse square law for distance from the infrared source. The fabricated LSMO nanofibers based Microbolometer has a significantly low thermal time constant with average thermal response and recovery time of 63 ms and 77 ms, respectively. Furthermore, they show encouraging bolometric properties with thermal conductance, thermal capacitance, and voltage responsivity,and thermal noise limited detectivity of 3.6 x 10 -3 WK -1 , 0.23 x 10 -3 JK -1 , and 1.96 x 10 5 VW- 1 and 3.7 x 108 cm Hz1/2/W respectively. The high voltage responsivity and TCR, commensurate with the ultralow response and recovery time confirm that the fabricated Microbolometer can find industrial applications as thermal sensors.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"183 2","pages":"0"},"PeriodicalIF":2.4000,"publicationDate":"2023-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micromechanics and Microengineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/1361-6439/ad0a3c","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Abstract La 1-x Sr x MnO 3 manganite oxides have shown great potential for infrared sensing. In this study, La 0.7 Sr 0.3 MnO 3 (LSMO) nanofibers, synthesized by a simple electrospinning process, are suspended between gold interdigitated electrodes(IDE). These electrodes, which acts as a supporting platform for the dangling nanofiber, are Microelectromechanical systems (MEMS) based that can be fabricated quickly and economically with fewer fabrication steps. Due to the large surface-area-to-volume ratio, these fibers have outstanding thermo-electrical properties, which puts them in the leagues of materials suitable for infrared sensing. Performance-wise these hanging nanofibers belong to a class of promising thermal sensors due to negligible thermal loss. The optoelectrical characterization shows its TCR is -1.48 %K -1 , and its electrical resistance follows an inverse square law for distance from the infrared source. The fabricated LSMO nanofibers based Microbolometer has a significantly low thermal time constant with average thermal response and recovery time of 63 ms and 77 ms, respectively. Furthermore, they show encouraging bolometric properties with thermal conductance, thermal capacitance, and voltage responsivity,and thermal noise limited detectivity of 3.6 x 10 -3 WK -1 , 0.23 x 10 -3 JK -1 , and 1.96 x 10 5 VW- 1 and 3.7 x 108 cm Hz1/2/W respectively. The high voltage responsivity and TCR, commensurate with the ultralow response and recovery time confirm that the fabricated Microbolometer can find industrial applications as thermal sensors.
期刊介绍:
Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data.
The journal is focussed on all aspects of:
-nano- and micro- mechanical systems
-nano- and micro- electomechanical systems
-nano- and micro- electrical and mechatronic systems
-nano- and micro- engineering
-nano- and micro- scale science
Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering.
Below are some examples of the topics that are included within the scope of the journal:
-MEMS and NEMS:
Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc.
-Fabrication techniques and manufacturing:
Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing.
-Packaging and Integration technologies.
-Materials, testing, and reliability.
-Micro- and nano-fluidics:
Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip.
-Lab-on-a-chip and micro- and nano-total analysis systems.
-Biomedical systems and devices:
Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces.
-Energy and power:
Including power MEMS/NEMS, energy harvesters, actuators, microbatteries.
-Electronics:
Including flexible electronics, wearable electronics, interface electronics.
-Optical systems.
-Robotics.