Fabrication and Characterization of suspended La0.7Sr0.3MnO3Nanofibers for high-sensitive and fast-responsive Infrared Bolometer

IF 2.4 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micromechanics and Microengineering Pub Date : 2023-11-07 DOI:10.1088/1361-6439/ad0a3c
nirupam paul, Sudharshan vandala, satish bonam, Amit Agrawal, Siva Rama Krishna Vanjari, Shiv Govind Singh
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Abstract

Abstract La 1-x Sr x MnO 3 manganite oxides have shown great potential for infrared sensing. In this study, La 0.7 Sr 0.3 MnO 3 (LSMO) nanofibers, synthesized by a simple electrospinning process, are suspended between gold interdigitated electrodes(IDE). These electrodes, which acts as a supporting platform for the dangling nanofiber, are Microelectromechanical systems (MEMS) based that can be fabricated quickly and economically with fewer fabrication steps. Due to the large surface-area-to-volume ratio, these fibers have outstanding thermo-electrical properties, which puts them in the leagues of materials suitable for infrared sensing. Performance-wise these hanging nanofibers belong to a class of promising thermal sensors due to negligible thermal loss. The optoelectrical characterization shows its TCR is -1.48 %K -1 , and its electrical resistance follows an inverse square law for distance from the infrared source. The fabricated LSMO nanofibers based Microbolometer has a significantly low thermal time constant with average thermal response and recovery time of 63 ms and 77 ms, respectively. Furthermore, they show encouraging bolometric properties with thermal conductance, thermal capacitance, and voltage responsivity,and thermal noise limited detectivity of 3.6 x 10 -3 WK -1 , 0.23 x 10 -3 JK -1 , and 1.96 x 10 5 VW- 1 and 3.7 x 108 cm Hz1/2/W respectively. The high voltage responsivity and TCR, commensurate with the ultralow response and recovery time confirm that the fabricated Microbolometer can find industrial applications as thermal sensors.
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高灵敏快速响应红外测热计用悬浮la0.7 sr0.3 mno3纳米纤维的制备与表征
摘要La 1-x Sr x mno3锰氧化物在红外传感领域显示出巨大的潜力。在本研究中,通过简单的静电纺丝工艺合成了la0.7 Sr 0.3 mno3 (LSMO)纳米纤维,并将其悬浮在金交错电极(IDE)之间。这些电极作为悬浮纳米纤维的支撑平台,是基于微机电系统(MEMS)的,可以用更少的制造步骤快速、经济地制造。由于大的表面积体积比,这些纤维具有出色的热电性能,这使它们成为适合红外传感的材料之一。性能方面,由于热损失可以忽略不计,这些悬挂纳米纤维属于一类有前途的热传感器。光电特性表明,其TCR为- 1.48% K -1,其电阻与红外源距离呈平方反比规律。制备的LSMO纳米纤维微测热计具有较低的热时间常数,平均热响应和恢复时间分别为63 ms和77 ms。此外,它们在热导、热电容和电压响应性方面表现出令人鼓舞的热特性,热噪声限制探测率分别为3.6 × 10 -3 WK -1、0.23 × 10 -3 JK -1、1.96 × 10 - 5 VW- 1和3.7 × 108 cm Hz1/2/W。高电压响应率和TCR,与超低响应和恢复时间相匹配,证实了所制造的微热计可以作为热传感器找到工业应用。
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来源期刊
Journal of Micromechanics and Microengineering
Journal of Micromechanics and Microengineering 工程技术-材料科学:综合
CiteScore
4.50
自引率
4.30%
发文量
136
审稿时长
2.8 months
期刊介绍: Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.
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