Linjin Shi, Mengjiao Qu, Dongze Lv, Weiting Liu, Jin Xie
{"title":"A Two-channel Ultrasonic Flowmeter Based on AlN Piezoelectric Micromachined Ultrasonic Transducers Arrays with Improved Cross-correlation Method","authors":"Linjin Shi, Mengjiao Qu, Dongze Lv, Weiting Liu, Jin Xie","doi":"10.1088/1361-6439/ad0307","DOIUrl":null,"url":null,"abstract":"Abstract This paper presents a highly accurate two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers (PMUTs) to measure flow rate in small-diameter pipes (9.6 mm). The ultrasonic transducers consist of four 10 by 10 PMUTs arrays with resonant frequency of 1 MHz in air. The ultrasonic transducers are excited by continuous sine voltage, and the transmitted and received signals are subjected to cross-correlation operation to obtain the time delay of the ultrasonic wave in the liquid. A dual-channel design of the flowmeter can reduce measurement errors by taking the average value. To reduce errors in the cross-correlation operation, an iterative algorithm is proposed, which effectively improves the measurement accuracy. The flowmeter is evaluated in flow range of 3.5–10 l min −1 , and has a small relative error of 0.7%.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"72 5","pages":"0"},"PeriodicalIF":2.4000,"publicationDate":"2023-10-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micromechanics and Microengineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/1361-6439/ad0307","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Abstract This paper presents a highly accurate two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers (PMUTs) to measure flow rate in small-diameter pipes (9.6 mm). The ultrasonic transducers consist of four 10 by 10 PMUTs arrays with resonant frequency of 1 MHz in air. The ultrasonic transducers are excited by continuous sine voltage, and the transmitted and received signals are subjected to cross-correlation operation to obtain the time delay of the ultrasonic wave in the liquid. A dual-channel design of the flowmeter can reduce measurement errors by taking the average value. To reduce errors in the cross-correlation operation, an iterative algorithm is proposed, which effectively improves the measurement accuracy. The flowmeter is evaluated in flow range of 3.5–10 l min −1 , and has a small relative error of 0.7%.
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Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data.
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