Abstract

The electrodes play an important role in generating and maintaining the plasma, as well as controlling the properties of the plasma and improving the quality of the deposited films. This study aims to analyze the effect of the shape of the top electrode on the distribution of the resulting plasma. The electrodes used in this study consist of two electrodes (upper and lower electrodes) arranged in a Capacitive Coupled configuration. Discharges. The thickness of the top electrode is 1 cm. The shape of the top electrode used in this study is a beam and a cylinder. The resulting plasma distribution was observed using conventional imaging techniques. The results showed that the shape of the electrodes affected the distribution of the resulting plasma. The top electrode in the form of a beam produces plasma that tends to be homogeneous compared to the plasma produced by the top electrode in the form of a cylinder.