{"title":"Lithography and 3D Fabrication Processes: A Review","authors":"Abhishek Kumar, Swapnendu Narayan Ghosh, Santanu Talukder, Deepak Chopra","doi":"10.30919/esmm974","DOIUrl":null,"url":null,"abstract":": The present review provides in-depth insights of the various lithographic processes that are currently being used in academic and industrial research labs for fabricating various micro-and nano-scale devices. All the patterning techniques discussed in this review have their own unique set of characteristics and use-case depending on the design requirement of the devices that need to be fabricated. This has tremendous implications in the electronic industry.","PeriodicalId":11851,"journal":{"name":"ES Materials & Manufacturing","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ES Materials & Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.30919/esmm974","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
: The present review provides in-depth insights of the various lithographic processes that are currently being used in academic and industrial research labs for fabricating various micro-and nano-scale devices. All the patterning techniques discussed in this review have their own unique set of characteristics and use-case depending on the design requirement of the devices that need to be fabricated. This has tremendous implications in the electronic industry.
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