Profilometry by zero-order interference fringe identification in the Commission Internationale de l’Eclairage system

IF 1.2 4区物理与天体物理 Q4 OPTICS Journal of Modern Optics Pub Date : 2023-04-16 DOI:10.1080/09500340.2023.2266049

Alexandra Plata Planidina, Carolina Mendoza Luna, Jáder Enrique Guerrero Bermúdez, Arturo Plata Gómez

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Abstract

AbstractIn this study, a numerical procedure is proposed to determine the optical contact (peak of the coherence function) in a scanning white light interferential microscope. The Red, Green and Blue image of the correlogram is transformed to the Commission Internationale de l’Eclairage chromatic system with x,y,z coordinates. The key element is to track the orientation of the curve (trajectory) which exhibits changes as it passes through the optical contact. The path described by the interferogram in this chromatic space makes it possible to localize, without ambiguity, the zero-order fringe and from this information to reconstruct the topography of an object of the order of a few tens of nanometres.KEYWORDS: Scanning white light interferometryCIExyz colour systemlow-coherence interferometrycolour CCD Disclosure statementNo potential conflict of interest was reported by the author(s).Additional informationFundingCML thanks Ministerio de Ciencia, Tecnología e Innovación (Minciencia-Colombia) for its financial support.

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基于零阶干涉条纹识别的轮廓测量技术在国际委员会系统中的应用

摘要本文提出了一种确定扫描白光干涉显微镜光学接触(相干函数峰值)的数值计算方法。相关图的红、绿、蓝图像被转换为具有x、y、z坐标的国际eclairage委员会色系。关键要素是跟踪曲线(轨迹)的方向，它在通过光学接触时表现出变化。干涉图在这个色空间中描述的路径使得定位零阶条纹成为可能，没有歧义，并从这个信息重建几十纳米量级的物体的地形。关键词:扫描白光干涉;ciexyz彩色系统;低相干干涉;彩色CCDcml感谢哥伦比亚科学部Tecnología和Innovación(哥伦比亚科学部-哥伦比亚)提供的资金支持。

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来源期刊

Journal of Modern Optics 物理-光学

CiteScore

2.90

自引率

0.00%

发文量

审稿时长

2.6 months

期刊介绍： The journal (under its former title Optica Acta) was founded in 1953 - some years before the advent of the laser - as an international journal of optics. Since then optical research has changed greatly; fresh areas of inquiry have been explored, different techniques have been employed and the range of application has greatly increased. The journal has continued to reflect these advances as part of its steadily widening scope. Journal of Modern Optics aims to publish original and timely contributions to optical knowledge from educational institutions, government establishments and industrial R&D groups world-wide. The whole field of classical and quantum optics is covered. Papers may deal with the applications of fundamentals of modern optics, considering both experimental and theoretical aspects of contemporary research. In addition to regular papers, there are topical and tutorial reviews, and special issues on highlighted areas. All manuscript submissions are subject to initial appraisal by the Editor, and, if found suitable for further consideration, to peer review by independent, anonymous expert referees. General topics covered include: • Optical and photonic materials (inc. metamaterials) • Plasmonics and nanophotonics • Quantum optics (inc. quantum information) • Optical instrumentation and technology (inc. detectors, metrology, sensors, lasers) • Coherence, propagation, polarization and manipulation (classical optics) • Scattering and holography (diffractive optics) • Optical fibres and optical communications (inc. integrated optics, amplifiers) • Vision science and applications • Medical and biomedical optics • Nonlinear and ultrafast optics (inc. harmonic generation, multiphoton spectroscopy) • Imaging and Image processing