{"title":"Spectroscopic Analysis of Effects of Additive Nitrogen on Atmospheric Pressure Ar/HMDS Plasma","authors":"Jonggu Han, Rodolphe Mauchauffé, Se Youn Moon","doi":"10.5757/asct.2023.32.5.114","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":8223,"journal":{"name":"Applied Science and Convergence Technology","volume":null,"pages":null},"PeriodicalIF":1.2000,"publicationDate":"2023-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Science and Convergence Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5757/asct.2023.32.5.114","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
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