Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target

IF 0.4 4区 计算机科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Communications Technology and Electronics Pub Date : 2023-12-13 DOI:10.1134/s1064226923100078
D. V. Kolodko, A. V. Kaziev, D. G. Ageichenkov, V. Yu. Lisenkov
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Abstract

A group of high-energy positive O+ ions in a plasma flow from a high-current pulsed magnetron discharge with a hot target in an Ar/O2 gas mixture. The mechanism of occurrence of accelerated O+ ions is the conversion of negative ions accelerated in the cathode layer O → O+ in the processes of charge exchange or ionization by electron impact.

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热靶脉冲磁控管放电中等离子体中的高能正氧离子到基底的通量
在Ar/O2混合气体中,带热靶的大电流脉冲磁控管放电等离子体中存在一组高能正O+离子。加速O+离子发生的机理是在电荷交换或电子冲击电离过程中,阴极层中加速的负离子O -→O+的转化。
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来源期刊
CiteScore
1.00
自引率
20.00%
发文量
170
审稿时长
10.5 months
期刊介绍: Journal of Communications Technology and Electronics is a journal that publishes articles on a broad spectrum of theoretical, fundamental, and applied issues of radio engineering, communication, and electron physics. It publishes original articles from the leading scientific and research centers. The journal covers all essential branches of electromagnetics, wave propagation theory, signal processing, transmission lines, telecommunications, physics of semiconductors, and physical processes in electron devices, as well as applications in biology, medicine, microelectronics, nanoelectronics, electron and ion emission, etc.
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