A. Zykov, N. Yefymenko, S. Dudin, S. Yakovin, N. Azarenkov
{"title":"GENERATION OF COMPENSATED ION-ELECTRON FLOW IN THE COMBINED MAGNETRON-ION-PLASMA SYSTEM","authors":"A. Zykov, N. Yefymenko, S. Dudin, S. Yakovin, N. Azarenkov","doi":"10.46813/2023-148-090","DOIUrl":null,"url":null,"abstract":"The design and characteristics of the combined Magnetron-Ion-Plasma System (MIPS) are presented. The system includes a magnetron sputtering system and a Hall-type ion source with a common magnetic system and common power supply allowing the generation of quasi-neutral ion-electron flow, which provides complete charge neutralization on the processed dielectric surface. The formation of the anode electron layer and the energy spectra of ions are experimentally investigated. A phenomenological model of the combined discharge in EН fields is proposed. Theoretical calculations and experimental data are in reasonable agreement.","PeriodicalId":54580,"journal":{"name":"Problems of Atomic Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.5000,"publicationDate":"2023-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Problems of Atomic Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.46813/2023-148-090","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, NUCLEAR","Score":null,"Total":0}
引用次数: 0
Abstract
The design and characteristics of the combined Magnetron-Ion-Plasma System (MIPS) are presented. The system includes a magnetron sputtering system and a Hall-type ion source with a common magnetic system and common power supply allowing the generation of quasi-neutral ion-electron flow, which provides complete charge neutralization on the processed dielectric surface. The formation of the anode electron layer and the energy spectra of ions are experimentally investigated. A phenomenological model of the combined discharge in EН fields is proposed. Theoretical calculations and experimental data are in reasonable agreement.
期刊介绍：
The journal covers the following topics:
Physics of Radiation Effects and Radiation Materials Science;
Nuclear Physics Investigations;
Plasma Physics;
Vacuum, Pure Materials and Superconductors;
Plasma Electronics and New Methods of Acceleration.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
