Comparative study on the effect of substrates on electrical properties of tin and chromium thin films

Abstract

In thin film technology, substrate materials happen to be one of the deposition parameters that determine the physical properties of films. Hence, soda-lime glass and quartz continue to be the widely utilized substrate materials because of their high-frequency performance, price, and surface quality. For certain applications, various substrate materials that provide an acceptable compromise for the work at hand are required. Soda-lime glass and quartz have been chosen as the substrates for the tin and chromium thin films that will be produced via thermal evaporation in a vacuum. A comparative study on the electrical properties of chromium films was made in the light of Fuchs–Sondheimer and Mayadas–Shatzkes theories. Numerous physical properties, including resistivity of infinitely thick film, sticking coefficient, conduction electron mean free, etc., may be determined from resistivity-thickness data.