{"title":"MEASUREMENT OF SILICON MELT TEMPERATURE DURING ELECTRON BEAM REFINING","authors":"V. G. Shchukin, V. O. Konstantinov","doi":"10.1134/S0021894423050048","DOIUrl":null,"url":null,"abstract":"<p>A method for measuring the temperature of the silicon melt during plasma-chemical electron-beam refining is proposed. The method is based on measuring the radiation intensity from the melt in the infrared range and comparing it with the temperature. It is established that changing the refining conditions, in particular, the electron beam current allows a controlled change in the temperature refined silicon from 1500 K to 2600 K.</p>","PeriodicalId":608,"journal":{"name":"Journal of Applied Mechanics and Technical Physics","volume":"64 5","pages":"767 - 771"},"PeriodicalIF":0.5000,"publicationDate":"2024-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Applied Mechanics and Technical Physics","FirstCategoryId":"5","ListUrlMain":"https://link.springer.com/article/10.1134/S0021894423050048","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MECHANICS","Score":null,"Total":0}
引用次数: 0
Abstract
A method for measuring the temperature of the silicon melt during plasma-chemical electron-beam refining is proposed. The method is based on measuring the radiation intensity from the melt in the infrared range and comparing it with the temperature. It is established that changing the refining conditions, in particular, the electron beam current allows a controlled change in the temperature refined silicon from 1500 K to 2600 K.
期刊介绍:
Journal of Applied Mechanics and Technical Physics is a journal published in collaboration with the Siberian Branch of the Russian Academy of Sciences. The Journal presents papers on fluid mechanics and applied physics. Each issue contains valuable contributions on hypersonic flows; boundary layer theory; turbulence and hydrodynamic stability; free boundary flows; plasma physics; shock waves; explosives and detonation processes; combustion theory; multiphase flows; heat and mass transfer; composite materials and thermal properties of new materials, plasticity, creep, and failure.