Free light-shape focusing in extreme-ultraviolet radiation with self-evolutionary photon sieves

IF 3.8 2区综合性期刊 Q1 MULTIDISCIPLINARY SCIENCES Scientific Reports Pub Date : 2024-01-19 DOI:10.1038/s41598-024-51902-1

Huaiyu Cui, Xiuping Zhang, You Li, Dongdi Zhao, Junyong Zhang, Yongpeng Zhao

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Abstract

Extreme-ultraviolet (EUV) radiation is a promising tool, not only for probing microscopic activities but also for processing nanoscale structures and performing high-resolution imaging. In this study, we demonstrate an innovative method to generate free light-shape focusing with self-evolutionary photon sieves under a single-shot coherent EUV laser; this includes vortex focus shaping, array focusing, and structured-light shaping. The results demonstrate that self-evolutionary photon sieves, consisting of a large number of specific pinholes fabricated on a piece of Si₃N₄ membrane, are capable of freely regulating an EUV light field, for which high-performance focusing elements are extremely lacking, let alone free light-shape focusing. Our proposed versatile photon sieves are a key breakthrough in focusing technology in the EUV region and pave the way for high-resolution soft X-ray microscopy, spectroscopy in materials science, shorter lithography, and attosecond metrology in next-generation synchrotron radiation and free-electron lasers.

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利用自进化光子筛在极紫外辐射中自由聚焦光形

极紫外（EUV）辐射是一种前景广阔的工具，不仅可用于探测微观活动，还可用于处理纳米级结构和进行高分辨率成像。在本研究中，我们展示了一种在单次相干超紫外激光下利用自演化光子筛产生自由光形聚焦的创新方法，其中包括涡旋聚焦整形、阵列聚焦和结构光整形。研究结果表明，自进化光子筛由在一片 Si3N4 薄膜上制作的大量特定针孔组成，能够自由调节极紫外光场，而目前极缺乏高性能的聚焦元件，更不用说自由光形聚焦了。我们提出的多功能光子筛是超紫外区聚焦技术的关键突破，为高分辨率软 X 射线显微镜、材料科学中的光谱学、更短的光刻技术以及下一代同步辐射和自由电子激光中的阿秒计量铺平了道路。

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来源期刊

Scientific Reports Natural Science Disciplines-

CiteScore

7.50

自引率

4.30%

发文量

19567

审稿时长

3.9 months

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