Size‐Dependent Characteristics of InGaN‐Based Blue and Green Micro‐Light‐Emitting Diodes

Shyam Mohan, Joocheol Jeong, Minho Kim, Yunseok Heo, Jooyong Park, Joonhyuk Lee, Jinwan Kim, Jeonghun Heo, Okhyun Nam
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Abstract

This study focuses on investigating the size‐dependent characteristics (chip diameter: 100–10 μm) of InGaN‐based blue and green micro‐light‐emitting diodes (μLEDs) with respect to their electrical and optical properties. The LED's epistructure is grown using the metal–organic chemical vapor deposition technique, preceded by simulation and optimization using SiLENSe LED simulator. The cross‐sectional transmission electron microscopy study confirms the epistructure. The Photoluminescence mapping of the epistructure reveals that the blue emission is at 461 nm (full width at half maximum [FWHM] ≈ 15.5 nm) and the green emission is at 510 nm (FWHM ≈ 17.5 nm). The study analyzes the size‐dependent external quantum efficiency (EQE), optical power, and peak wavelength shift between blue and green μLEDs. The electroluminescence (EL) study reveals that the redshift of the EL peak wavelength of μLEDs is attributed to the release of strain at reduced chip sizes. The size‐dependent EQE study shows a reduction of EQE with shrunken chip size, attributed to the increase of nonradiative Shockley–Read–Hall recombination. Finally, the study estimates the characteristics temperature of the μLEDs using temperature‐dependent EL measurement, revealing that blue μLEDs exhibit a significantly large value of characteristic temperature ≈1926 K.
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基于 InGaN 的蓝色和绿色微型发光二极管的尺寸相关特性
本研究的重点是研究基于 InGaN 的蓝色和绿色微型发光二极管(μLEDs)在电气和光学特性方面的尺寸相关特性(芯片直径:100-10 μm)。LED 的外延结构是利用金属有机化学气相沉积技术生长出来的,然后利用 SiLENSe LED 模拟器进行了模拟和优化。横截面透射电子显微镜研究证实了这种外延结构。外延结构的光致发光图显示,蓝色发射波长为 461 nm(半最大值全宽 [FWHM] ≈ 15.5 nm),绿色发射波长为 510 nm(半最大值全宽 ≈ 17.5 nm)。该研究分析了与尺寸有关的外部量子效率(EQE)、光功率以及蓝色和绿色 μLED 之间的峰值波长偏移。电致发光(EL)研究表明,μLED EL 峰值波长的红移归因于芯片尺寸缩小时应变的释放。与尺寸相关的 EQE 研究表明,EQE 会随着芯片尺寸的缩小而降低,这归因于非辐射肖克利-雷德-霍尔重组的增加。最后,研究利用随温度变化的电致发光测量法估算了μLED 的特征温度,发现蓝色μLED 的特征温度值明显大于 1926 K。
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