FeZrN Films with Nanocomposite Structure for Soft Magnetic Applications

IF 1.1 4区 材料科学 Q3 METALLURGY & METALLURGICAL ENGINEERING Physics of Metals and Metallography Pub Date : 2024-02-05 DOI:10.1134/s0031918x23601336
E. N. Sheftel, E. V. Harin, V. A. Tedzhetov, G. Sh. Usmanova
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Abstract

The Fe56.8–72.5Zr5.9–11.6N13.8–31.6O1.2–3.4 films were prepared by magnetron deposition. The metastable structural and phase state, which was formed upon deposition, is represented by either mixed (nanocrystalline αFe(Zr,N) + amorphous) or amorphous structure. During subsequent annealing (300–600°C), it slightly shifts toward the stable state due to partial crystallization of the amorphous phase and precipitation of the secondary phases (Fe4N, Fe3N, and ZrO2). The grain structure of the films (grains 3–12 nm in size) is characterized by thermal stability. The relatively low saturation magnetization Ms (870–1400 G) of the films is explained by the presence of the amorphous phase and αFe(Zr,N) solid solution, which remain in the film structure after annealing at all temperatures. The stochastic domain structure is formed in all films under study due to exchange interaction between grains and clusters in the amorphous structure. The strong dependence of the magnetic structure on the phase state and grain structure of the films is demonstrated. The combination of low local magnetic anisotropy and the highest stochastic domain size predetermines the lowest coercive field of the films, which varies in a range of 1 to 50 Oe.

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用于软磁应用的具有纳米复合结构的 FeZrN 薄膜
摘要 采用磁控沉积法制备了 Fe56.8-72.5Zr5.9-11.6N13.8-31.6O1.2-3.4 薄膜。沉积后形成的蜕变结构和相态表现为混合结构(纳米晶αFe(Zr,N) + 非晶)或非晶结构。在随后的退火(300-600°C)过程中,由于非晶相的部分结晶和次生相(Fe4N、Fe3N 和 ZrO2)的析出,非晶相略微向稳定状态转变。薄膜的晶粒结构(晶粒大小为 3-12 nm)具有热稳定性的特点。薄膜的饱和磁化率 Ms(870-1400 G)相对较低,这是因为薄膜结构中存在非晶相和αFe(Zr,N) 固溶体,它们在所有温度下退火后仍然存在。由于非晶结构中晶粒和晶簇之间的交换相互作用,所有研究薄膜中都形成了随机畴结构。磁性结构与薄膜的相态和晶粒结构密切相关。低局部磁各向异性和最高随机畴尺寸的组合预先决定了薄膜的最低矫顽力场,其变化范围在 1 到 50 Oe 之间。
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来源期刊
Physics of Metals and Metallography
Physics of Metals and Metallography 工程技术-冶金工程
CiteScore
2.00
自引率
25.00%
发文量
108
审稿时长
3 months
期刊介绍: The Physics of Metals and Metallography (Fizika metallov i metallovedenie) was founded in 1955 by the USSR Academy of Sciences. Its scientific profile involves the theory of metals and metal alloys, their electrical and magnetic properties, as well as their structure, phase transformations, and principal mechanical properties. The journal also publishes scientific reviews and papers written by experts involved in fundamental, application, and technological studies. The annual volume of publications amounts to some 250 papers submitted from 100 leading national scientific institutions.
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