Lei Zhang, H. Huang, Zhichao Qian, Mengqian Wang, Wei Zhang, Hongwei Li, Azhati Lina, Ke Tang, Linjun Wang, Jian Huang
{"title":"Effect of sputtering power on the properties of Al-doped Ga2O3 thin films","authors":"Lei Zhang, H. Huang, Zhichao Qian, Mengqian Wang, Wei Zhang, Hongwei Li, Azhati Lina, Ke Tang, Linjun Wang, Jian Huang","doi":"10.1117/12.3016339","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517195,"journal":{"name":"Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023)","volume":"417 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3016339","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}