{"title":"Linear image sensor with triangular pixel geometry specialized for the light section method","authors":"Munenori Takumi, Keisuke Uchida, Katsuhiro Ishii","doi":"10.1007/s10043-024-00872-w","DOIUrl":null,"url":null,"abstract":"<div><p>We propose a linear image sensor specialized for the light section method to achieve high-speed and low-latency height measurement. This linear image sensor has pixels in the shape of triangles pointing upward and downward, which allows fast data readout and simple data processing of the cross-sectional profile acquisition. We have confirmed the basic feasibility of the sensor by numerical simulation. We also fabricated a prototype of the proposed sensor with 508 pixels. We conducted height measurement of the vertical translate stage and the step pyramid-shaped object and confirmed that the proposed sensor functions as a sensor for light section method.</p></div>","PeriodicalId":722,"journal":{"name":"Optical Review","volume":"31 2","pages":"258 - 265"},"PeriodicalIF":0.9000,"publicationDate":"2024-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Review","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s10043-024-00872-w","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0
Abstract
We propose a linear image sensor specialized for the light section method to achieve high-speed and low-latency height measurement. This linear image sensor has pixels in the shape of triangles pointing upward and downward, which allows fast data readout and simple data processing of the cross-sectional profile acquisition. We have confirmed the basic feasibility of the sensor by numerical simulation. We also fabricated a prototype of the proposed sensor with 508 pixels. We conducted height measurement of the vertical translate stage and the step pyramid-shaped object and confirmed that the proposed sensor functions as a sensor for light section method.
期刊介绍：
Optical Review is an international journal published by the Optical Society of Japan. The scope of the journal is:
General and physical optics;
Quantum optics and spectroscopy;
Information optics;
Photonics and optoelectronics;
Biomedical photonics and biological optics;
Lasers;
Nonlinear optics;
Optical systems and technologies;
Optical materials and manufacturing technologies;
Vision;
Infrared and short wavelength optics;
Cross-disciplinary areas such as environmental, energy, food, agriculture and space technologies;
Other optical methods and applications.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
