Robust ultrablack film deposited on large-curvature magnesium alloy by atomic layer deposition

Jianfei Jin, Lin Lv, Lu Yan, Ying Li, Yunzhen Cao
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Abstract

A broadband absorber composed of a TiAlC/SiO2 film stack prepared by atomic layer deposition was presented, which could be uniformly coated on magnesium alloys with large curvature, achieving an average absorption as high as 99.4% within the wavelength range from 400 to 1000 nm. An Al2O3/TiO2 interlayer was deposited on magnesium alloys prior to the deposition of ultrablack films, which effectively prevented corrosion of magnesium caused by Al3+ and Cl− by-products in the TiAlC film. With the presence of this interlayer, the ultrablack film on the surface of the magnesium alloy exhibited good adhesion and abrasion resistance. Furthermore, after undergoing damp heat and thermal cycling tests, the absorptions of the ultrablack film-coated magnesium alloys remained at 99.1% and 99.0%, respectively, which indicated that the film is promising for application in precision optics under harsh environmental conditions.
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利用原子层沉积技术在大曲率镁合金上沉积坚固的超黑薄膜
介绍了一种由原子层沉积制备的 TiAlC/SiO2 薄膜叠层组成的宽带吸收器,该吸收器可均匀地涂覆在曲率较大的镁合金上,在 400 至 1000 纳米波长范围内的平均吸收率高达 99.4%。在沉积超黑膜之前,在镁合金上沉积了一层 Al2O3/TiO2 中间膜,它能有效防止 TiAlC 膜中的 Al3+ 和 Cl- 副产物对镁的腐蚀。有了这层中间膜,镁合金表面的超黑膜就表现出了良好的附着力和耐磨性。此外,经过湿热和热循环测试后,涂有超黑膜的镁合金的吸收率分别保持在 99.1% 和 99.0%,这表明该薄膜有望在恶劣环境条件下应用于精密光学领域。
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