{"title":"Surface profile measurement and parametersanalysis of silicon wafer in the upright state","authors":"Ying Yang, Sen Han, Linghua Zhang, Yuhang Shen","doi":"10.1364/ao.515440","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":503884,"journal":{"name":"Applied Optics","volume":"36 9-10","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/ao.515440","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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