Paul Somers, Matthias Steurer, Steven Kraus, Florian Feist, Ben Breitung, Gabriel C. Marques, B. Weinert, Christian Dolle, Erich Müller, Jasmin Aghassi-Hagmann, Stefanie Dehnen, Y. Eggeler, Claus Feldmann, Christopher Barner-Kowollik, Martin Wegener
{"title":"Recent progress in the laser microprinting of semiconductors and metals","authors":"Paul Somers, Matthias Steurer, Steven Kraus, Florian Feist, Ben Breitung, Gabriel C. Marques, B. Weinert, Christian Dolle, Erich Müller, Jasmin Aghassi-Hagmann, Stefanie Dehnen, Y. Eggeler, Claus Feldmann, Christopher Barner-Kowollik, Martin Wegener","doi":"10.1117/12.2692064","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"11 2","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2692064","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}