High-energy UV lasers for display and green energy applications

Robin Rammelsberg, Ralph Delmdahl, Oliver Haupt
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Abstract

The next generation of power saving displays, superconductivity-driven carbon-free energy generation, semiconductor manufacturing, and also refractive eye surgery largely hinge on photonics-based precision manufacturing. They all benefit from the unique technical properties of excimer lasers, namely the laser's short wavelength in the ultraviolet range of the spectrum and the high pulse energy output. Gen 8 display fab expansion, capacity upscaling of superconducting tapes for future fusion reactors, and new tool developments for inspection and thin film manufacturing in the semiconductor industry are in full swing, and enabled by UV laser system technology.

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用于显示器和绿色能源应用的高能紫外线激光器
下一代节能显示器、超导驱动的无碳能源生产、半导体制造以及屈光眼科手术在很大程度上都取决于以光子学为基础的精密制造。它们都得益于准分子激光的独特技术特性,即激光在光谱紫外线范围内的短波长和高脉冲能量输出。第八代显示器工厂的扩建、未来聚变反应堆超导带的产能提升以及半导体行业检测和薄膜制造新工具的开发都在紫外激光系统技术的支持下如火如荼地进行着。
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