Modeling of ion transport from ionization region to entrance of mass spectrometer in HiPIMS argon/Cr target

J. Zgheib, P.-Y. Jouan, A. Rhallabi
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Abstract

Plasma global kinetic model coupled with the Monte Carlo method is used to study the ion transport in HiPIMS Ar/Cr target. The plasma kinetic global model is developed to study the time evolution of neutral, ion, and electron species created in the ionization region. To analyze the ion temporal spectra at the entrance of the mass spectrometer, a simple model based on the Monte Carlo technique is developed to track the ion trajectories from the ionization region to the mass spectrometer. The ion temporal spectra obtained by the global kinetic model in the ionization region are introduced in the Monte Carlo model as input data. The simulation results reveal a temporal shift of the ion spectra as well as their spreading in comparison with those obtained in the ionization region. Such temporal shapes of the ion spectra are more sensitive to the ion temperatures in the ionization region, and the position of the mass spectrometer is connected to the reactor. A satisfactory agreement between simulated ion temporal spectra and those measured by the mass spectrometer is obtained when we have represented the ion population energies by two Maxwellian distributions, where the first one corresponds to the low temperature and the second to the high temperature.
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HiPIMS 氩/钙靶中从电离区到质谱仪入口的离子传输建模
等离子体全局动力学模型与蒙特卡罗方法相结合,用于研究 HiPIMS Ar/Cr 靶中的离子传输。建立等离子体动力学全局模型是为了研究电离区产生的中性、离子和电子物种的时间演化。为了分析质谱仪入口处的离子时间光谱,建立了一个基于蒙特卡罗技术的简单模型,以跟踪从电离区到质谱仪的离子轨迹。通过电离区的全局动力学模型获得的离子时间光谱作为输入数据被引入蒙特卡洛模型。模拟结果显示,与在电离区获得的结果相比,离子谱发生了时间上的移动和扩散。离子光谱的这种时间形状对电离区的离子温度以及质谱仪与反应器相连的位置更为敏感。当我们用两个麦克斯韦分布(第一个对应低温,第二个对应高温)来表示离子群能量时,模拟的离子时间谱与质谱仪测量的离子时间谱之间的一致性令人满意。
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