{"title":"Ultra-sensitive LC MEMS for bladder pressure monitoring using modified slotted diaphragm","authors":"L. Tahar, K. Malika","doi":"10.15251/djnb.2024.191.351","DOIUrl":null,"url":null,"abstract":"In this paper, we have designed and simulated an implantable MEMS-based LC pressure sensor for bladder pressure monitoring. The device is composed of metal-insulator-metal capacitive sensor in which the size of the diaphragm is 1 mm × 1 mm of 5 µm thickness. Besides, novel modified-slotted diaphragm is developed to improve the sensitivity by decreasing the mechanical rigidity of the membrane. We used the COMSOL Multiphysics a tool for design and simulation. According to the results, the frequency response to the variable pressure is varied within the range of 35.23 to 119.72 MHz, the results also yield a value obtained of the quality factor is worth 32 with high value of 4.22 kHz/Pa sensor sensitivity. Hence, this sensor with a novel modified-slotted diaphragm has a high-pressure sensitivity, which shows 2.91 times more sensitivity than clamped diaphragm.","PeriodicalId":1,"journal":{"name":"Accounts of Chemical Research","volume":"102 47","pages":""},"PeriodicalIF":17.7000,"publicationDate":"2024-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Accounts of Chemical Research","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.15251/djnb.2024.191.351","RegionNum":1,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, we have designed and simulated an implantable MEMS-based LC pressure sensor for bladder pressure monitoring. The device is composed of metal-insulator-metal capacitive sensor in which the size of the diaphragm is 1 mm × 1 mm of 5 µm thickness. Besides, novel modified-slotted diaphragm is developed to improve the sensitivity by decreasing the mechanical rigidity of the membrane. We used the COMSOL Multiphysics a tool for design and simulation. According to the results, the frequency response to the variable pressure is varied within the range of 35.23 to 119.72 MHz, the results also yield a value obtained of the quality factor is worth 32 with high value of 4.22 kHz/Pa sensor sensitivity. Hence, this sensor with a novel modified-slotted diaphragm has a high-pressure sensitivity, which shows 2.91 times more sensitivity than clamped diaphragm.
期刊介绍：
Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance.
Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.
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