{"title":"Enhancement of simulation and design for ideal overlay with target asymmetry using COMSOL multiphysics","authors":"Doogyu Lee, H. Baac","doi":"10.1117/12.3001644","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517870,"journal":{"name":"Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII","volume":"160 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3001644","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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