C. Grigoropoulos, Y. Rho, Matthew Eliceiri, Runxuan Li
{"title":"Laser chemical processing of layered films and etching of semiconductors","authors":"C. Grigoropoulos, Y. Rho, Matthew Eliceiri, Runxuan Li","doi":"10.1117/12.3004187","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517754,"journal":{"name":"Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024","volume":"3 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3004187","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}