Dion C. Mathews, Jikai Wang, M. Kaiser, M. Kumkar, J. Hellstern, J. Kleiner, Daniel Flamm
{"title":"Photonic shaping tools for large-scale micro-machining","authors":"Dion C. Mathews, Jikai Wang, M. Kaiser, M. Kumkar, J. Hellstern, J. Kleiner, Daniel Flamm","doi":"10.1117/12.3002862","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517849,"journal":{"name":"Laser-based Micro- and Nanoprocessing XVIII","volume":"12 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser-based Micro- and Nanoprocessing XVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3002862","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}