Júlia Sancho-Tapia, Enric Bertran-Sierra, R. Ospina
{"title":"Carbon nanotubes grown by plasma enhanced chemical vapor deposition of acetylene in the presence of water vapor","authors":"Júlia Sancho-Tapia, Enric Bertran-Sierra, R. Ospina","doi":"10.18273/revuin.v23n1-2024004","DOIUrl":null,"url":null,"abstract":"Carbon nanotubes can be synthesized using various techniques. This work aims to study the experimental process of growing carbon nanotubes via plasma-enhanced chemical vapor deposition (PECVD). Additionally, the study aims to calibrate the reactor and develop a LabVIEW code to introduce water into the process, enabling a water-assisted PECVD procedure. The obtained samples are evaluated through the analysis of SEM images and Raman spectra.","PeriodicalId":278060,"journal":{"name":"Revista UIS Ingenierías","volume":"14 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Revista UIS Ingenierías","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.18273/revuin.v23n1-2024004","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Carbon nanotubes can be synthesized using various techniques. This work aims to study the experimental process of growing carbon nanotubes via plasma-enhanced chemical vapor deposition (PECVD). Additionally, the study aims to calibrate the reactor and develop a LabVIEW code to introduce water into the process, enabling a water-assisted PECVD procedure. The obtained samples are evaluated through the analysis of SEM images and Raman spectra.
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