Design and Fabrication of High Sensitivity MEMS Pressure Sensors for Aerospace Applications

Abstract

This technical summary discusses the layout and fabrication of high-sensitivity MEMS strain sensors for aerospace applications. There may be a need for fairly particular and dependable pressure sensors that can screen the stress in the plane cabin, gas tanks, and different systems. MEMS pressure sensors are appropriate for such programs because they provide improved accuracy, flexibility, and strength consumption. The design of high-sensitivity MEMS strain sensors for aerospace programs needs to remember some of the necessities that are unique to such programs. As an example, the sensor needs to be capable of resisting the excessive temperatures and pressures associated with operations at high altitudes, as well as the potentially corrosive and extraordinarily electrically conductive environment of the cabin. The sensors need to additionally provide excessive sensitivity and speedy reaction times at the same time as keeping excessive accuracy and stability. A number of fabrication and design techniques may be applied. As an example, using lasers, photolithography, thin movie deposition, etching, and different microfabrication techniques can permit the fabrication of excessive decision MEMS systems with extraordinarily small characteristic sizes.