Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system

IF 2.4 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micromechanics and Microengineering Pub Date : 2024-04-02 DOI:10.1088/1361-6439/ad2f47

Xu Yang, Xin Liu, Yilong Zhu, Feng Qiao, Shizhen Li, Zhiwei Zhu, Limin Zhu

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Abstract

A novel monolithic compliant Lorentz-force-driven XY nanopositioning system (MCLNS) is designed, analyzed, and experimentally assessed with the aim of high-resolution positioning across a large workspace. A double-symmetric Lorentz-force actuator (DSLA) with the benefits of zero friction, high thrust, and large stroke is proposed to generate the actuation force. Correspondingly, a monolithic four-prismatic parallel compliant mechanism (4P-PCM) is exploited to transmit the actuation motion to the central platform and minimize the parasitic motion. The unique integration of four DSLAs and one 4P-PCM make the proposed MCLNS possess compact structure and stable performance. The characterization of the MCLNS is formulated by a specially established analytical model and validated by finite-element analysis simulation and experimental tests. Experimental studies show that the workspace of the MCLNS prototype is large than 0.87 × 0.87 mm² and the positioning resolution of the MCLNS prototype is better than 9 nm. By means of a nonlinear forward proportional integral derivative control strategy, the maximum contouring error of the MCLNS is maintained within 2.7% while tracking a 1257 μm s⁻¹ circular trajectory.

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开发新型整体式顺应洛伦兹力驱动 XY 纳米定位系统

我们设计、分析并实验评估了一种新型单片顺应洛伦兹力驱动 XY 纳米定位系统 (MCLNS)，旨在实现大工作空间的高分辨率定位。提出了一种具有零摩擦、高推力和大行程等优点的双对称洛伦兹力致动器（DSLA）来产生致动力。相应地，利用单片四棱柱平行顺从机构（4P-PCM）将致动运动传递到中央平台，并将寄生运动降至最低。四个 DSLA 和一个 4P-PCM 的独特集成使所提出的 MCLNS 结构紧凑、性能稳定。MCLNS 的特性通过专门建立的分析模型进行表述，并通过有限元分析仿真和实验测试进行验证。实验研究表明，MCLNS 原型的工作空间大于 0.87 × 0.87 mm2，定位精度优于 9 nm。通过非线性前向比例积分导数控制策略，MCLNS 的最大轮廓误差在跟踪 1257 μm s-1 圆轨迹时保持在 2.7% 以内。

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来源期刊

Journal of Micromechanics and Microengineering 工程技术-材料科学：综合

CiteScore

4.50

自引率

4.30%

发文量

136

审稿时长

2.8 months

期刊介绍： Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.