{"title":"Model of Surface Nanorelief Formation under Irradiation with Gas Cluster Ions","authors":"D. R. Bessmertniy, A. E. Ieshkin","doi":"10.3103/s0027134924700115","DOIUrl":null,"url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract</h3><p>A model for the evolution of surface nanorelief under irradiation with gas cluster ions is proposed. The model is based on the consideration of individual cluster collisions with a surface. The amount of material sputtered from the collision area and the efficiency of its redeposition on other surface elements are determined. The model’s performance is demonstrated through comparison with experimental data. The stages of smoothing the model harmonic relief are investigated. A new measure of surface smoothing efficiency is proposed.</p>","PeriodicalId":711,"journal":{"name":"Moscow University Physics Bulletin","volume":null,"pages":null},"PeriodicalIF":0.4000,"publicationDate":"2024-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Moscow University Physics Bulletin","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.3103/s0027134924700115","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
A model for the evolution of surface nanorelief under irradiation with gas cluster ions is proposed. The model is based on the consideration of individual cluster collisions with a surface. The amount of material sputtered from the collision area and the efficiency of its redeposition on other surface elements are determined. The model’s performance is demonstrated through comparison with experimental data. The stages of smoothing the model harmonic relief are investigated. A new measure of surface smoothing efficiency is proposed.
期刊介绍：
Moscow University Physics Bulletin publishes original papers (reviews, articles, and brief communications) in the following fields of experimental and theoretical physics: theoretical and mathematical physics; physics of nuclei and elementary particles; radiophysics, electronics, acoustics; optics and spectroscopy; laser physics; condensed matter physics; chemical physics, physical kinetics, and plasma physics; biophysics and medical physics; astronomy, astrophysics, and cosmology; physics of the Earth’s, atmosphere, and hydrosphere.
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