{"title":"Consideration of the Distribution of Noise Level by Wavelength in Broadband Control of the Optical Coating Deposition Process","authors":"","doi":"10.3103/s0027134924700048","DOIUrl":null,"url":null,"abstract":"<span> <h3>Abstract</h3> <p>In the study, numerical results of simulations for the deposition process of a complex optical coating are presented, utilizing broadband monitoring of this process in the case where the noise level in the measured transmittance coefficient has a nonuniform distribution across the wavelength. The influence on the accuracy of control data at the edges of the measured wavelength range, where the error in the transmittance coefficient is maximal, is investigated. It is shown that the removal of some data at the edges of the range almost does not change the self-compensation factor of the errors in the deposition process, while the average norm of the error vector in the layer thicknesses significantly decreases. Thus, for the first time, it is demonstrated that taking into account the effect of error self-compensation in broadband control opens the possibility of a reasonable choice of the optimal spectral range for practical optical control.</p> </span>","PeriodicalId":711,"journal":{"name":"Moscow University Physics Bulletin","volume":null,"pages":null},"PeriodicalIF":0.4000,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Moscow University Physics Bulletin","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.3103/s0027134924700048","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
In the study, numerical results of simulations for the deposition process of a complex optical coating are presented, utilizing broadband monitoring of this process in the case where the noise level in the measured transmittance coefficient has a nonuniform distribution across the wavelength. The influence on the accuracy of control data at the edges of the measured wavelength range, where the error in the transmittance coefficient is maximal, is investigated. It is shown that the removal of some data at the edges of the range almost does not change the self-compensation factor of the errors in the deposition process, while the average norm of the error vector in the layer thicknesses significantly decreases. Thus, for the first time, it is demonstrated that taking into account the effect of error self-compensation in broadband control opens the possibility of a reasonable choice of the optimal spectral range for practical optical control.
期刊介绍：
Moscow University Physics Bulletin publishes original papers (reviews, articles, and brief communications) in the following fields of experimental and theoretical physics: theoretical and mathematical physics; physics of nuclei and elementary particles; radiophysics, electronics, acoustics; optics and spectroscopy; laser physics; condensed matter physics; chemical physics, physical kinetics, and plasma physics; biophysics and medical physics; astronomy, astrophysics, and cosmology; physics of the Earth’s, atmosphere, and hydrosphere.
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