Formation of ohmic contacts on heavily Al+-implanted p-type SiC without alloying process

IF 17.7 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY Accounts of Chemical Research Pub Date : 2024-04-25 DOI:10.35848/1347-4065/ad43cf

Kotaro Kuwahara, Takeaki Kitawaki, Masahiro Hara, M. Kaneko, Tsunenobu Kimoto

引用次数: 0

Abstract

Current–voltage (I–V) characteristics and contact resistivity (ρ c) of the Ni electrodes formed on heavily Al+-implanted p-type SiC without alloying process were investigated. A nearly ohmic I–V curve with ρ c of 9.3×10–2 Ωcm2 is demonstrated for non-alloyed Ni electrodes by very high-dose Al+ implantation (3.1×1020 cm−3). The net acceptor density dependence of the experimental ρ c can be described by a change in the contribution of direct tunneling and trap-assisted tunneling.

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在无合金化工艺的重度 Al+ 植入 p 型碳化硅上形成欧姆触点

研究了在未进行合金化处理的重度铝+植入 p 型碳化硅上形成的镍电极的电流-电压（I-V）特性和接触电阻率（ρ c）。通过高剂量 Al+ 植入（3.1×1020 cm-3），非合金化镍电极的 I-V 曲线接近欧姆，ρ c 为 9.3×10-2 Ωcm2。实验性 ρ c 的净受体密度依赖性可以通过直接隧穿和陷阱辅助隧穿的贡献率变化来描述。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.