{"title":"A Flexible PCB-Based MEMS Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator","authors":"Tao Chen, Cyrus Shafai","doi":"10.3390/proceedings2024097201","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517679,"journal":{"name":"Eurosensors 2023","volume":"50 8","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Eurosensors 2023","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3390/proceedings2024097201","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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