Three-Dimensional Nano-displacement Measurement by Four-Beam Laser Interferometry

Xu Zhang, Zi Wang, Mengnan Liu, Zhengxun Song, Zuobin Wang, Litong Dong
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利用四束激光干涉仪进行三维纳米位移测量
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来源期刊
Nanomanufacturing and Metrology
Nanomanufacturing and Metrology Materials Science-Materials Science (miscellaneous)
CiteScore
5.40
自引率
0.00%
发文量
36
期刊介绍: Nanomanufacturing and Metrology is a peer-reviewed, international and interdisciplinary research journal and is the first journal over the world that provides a principal forum for nano-manufacturing and nano-metrology.Nanomanufacturing and Metrology publishes in the forms including original articles, cutting-edge communications, timely review papers, technical reports, and case studies. Special issues devoted to developments in important topics in nano-manufacturing and metrology will be published periodically.Nanomanufacturing and Metrology publishes articles that focus on, but are not limited to, the following areas:• Nano-manufacturing and metrology• Atomic manufacturing and metrology• Micro-manufacturing and metrology• Physics, chemistry, and materials in micro-manufacturing, nano-manufacturing, and atomic manufacturing• Tools and processes for micro-manufacturing, nano-manufacturing and atomic manufacturing
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