Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma

IF 17.7 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY Accounts of Chemical Research Pub Date : 2024-04-09 DOI:10.18494/sam4829

Mina Sato, Mie Tohnishi, Akihiro Matsutani

引用次数: 0

Abstract

We demonstrated KOH etching with an etching mask amorphized by ion irradiation. Amorphized masks were prepared by irradiating ion species (Ar + , Kr + , Xe + , N + , O + ) at an ion energy of 500 eV with an electron cyclotron resonance ion shower system. The parameters for KOH etching were also studied. In addition, we fabricated structures with an aspect ratio of over 3000 and microfluidic devices using the proposed microfabrication technique. This technique is expected to be useful for the microfabrication of Si structures.

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利用电子回旋加速器等离子体提取的离子束蜕变的蚀刻掩模，用 KOH 蚀刻剂对硅进行微加工

我们利用通过离子辐照非晶化的蚀刻掩膜演示了 KOH 蚀刻。通过电子回旋共振离子辐照系统以 500 eV 的离子能量辐照离子种类（Ar + 、Kr + 、Xe + 、N + 、O + ）制备了非晶化掩膜。我们还研究了 KOH 蚀刻的参数。此外，我们还利用所提出的微制造技术制造了长宽比超过 3000 的结构和微流体设备。该技术有望用于硅结构的微加工。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.