Light Emission Characteristics in Nitride Semiconductor Nanowires Fabricated by Top‐down Method

K. Tateno, Masato Takiguchi, Kazuaki Ebata, Satoshi Sasaki, K. Kumakura, Y. Taniyasu
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Abstract

Nanophotonic devices made from nitride semiconductors are promising for various applications, especially those utilizing ultraviolet‐visible light with low‐power consumption and high driving speed. Herein, nanowire structures are fabricated from a light‐emitting diode  epitaxial wafer and demonstrates the effectiveness of wet etching in top‐down fabrication. Spontaneous emission from active layers and unanticipated lasing derived from a GaN layer in a single nanowire are observed by microphotoluminescence measurement. Lastly, the lasing mode through a 3D simulation of the eigenmodes in this nanowire structure is clarified.
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自上而下法制备的氮化物半导体纳米线的发光特性
由氮化物半导体制成的纳米光子器件在各种应用中大有可为,尤其是那些利用紫外-可见光、低功耗和高速驱动的器件。本文利用发光二极管外延晶片制造了纳米线结构,并展示了湿法蚀刻在自上而下制造中的有效性。通过显微光致发光测量,观察到了单根纳米线中有源层的自发辐射和来自氮化镓层的意想不到的激光。最后,通过对该纳米线结构中的特征模进行三维模拟,阐明了该纳米线结构的激光模式。
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